Abstract: With the rapid development of optoelectronic devices，polymer with micro- or nanopatterning has been widely used due to their unique physical and chemical properties. The technology of polymer rheology induced by a spatially modulated electric field is an important method for fabricating polymer micro- or nanopatterning and has been widely used. In this paper，the principle of processing polymer microstructure was discussed. A numerical approach for visualizing the full evolution of micro- or nanopatterning based on COMSOL Multiphysic was established，and the effect of the parameters such as electrode width and voltage，dimension of air space on the pattern formation were analyzed. Results showed that enlarging the electrode width and increasing the voltage could promote microstructure formation. When the air gap was fixed，reducing the film thickness helped the formation of microstructure. In addition，the numerical results of the phase-field method were better to agree with experimental observations，in comparison with the results of the level set method.

Key words: electric field induction, simulation, microstructures