Abstract: In the test of MEMS thermopile device，how to put thermopile devices under reasonable periodic infrared radiation incentive is one of the key steps if we want to get the accurate device parameter.As for the infrared incentive of the thermopile device in the development process of wafer level test system，it proposes a optical energy transmission method，different from the traditional test method of MEMS thermopile devices，this method has adopted the MEMS infrared illuminant JSIR450 to replace the traditional blackbody furnace as infrared radiation source and used the shutter to replace the optical chopper to realize periodic modulation of the infrared signal. We have validated that the method has good effect by experiments and proved that the blackbody emissivity of the MEMS infrared energy light source can meet the project requirements with integral method.

Key words: thermopile device, infrared radiation incentive, MEMS infrared illuminant, shutter, blackbody emissivity