Abstract: At present，it is one of the most effective ways to prepare silicon-carbon composite anode materials by compositing the silicon materials with high specific capacity and the carbon materials with stability. Among the many preparation processes of silicon-carbon composite anode materials，the silicon-carbon composite anode prepared by chemical vapor deposition（CVD） has the advantages of high charging/discharging efficiency，good cycle stability，facile process，and is suitable for mass production. This paper summarized the research progress of preparing silicon-carbon composite anode materials by chemical vapor deposition. From the perspective of silicon-carbon composites structure，such as coreshell structure， yolk-shell structure， porous structure， and embedded structure， the structural design and battery performance of different types of silicon-carbon composite anode materials were introduced， and their advantages and existing the problem were discussed. Finally，the application of silicon-carbon composite anode materials prepared by CVD was summarized，and we prospected the future of industrialization of silicon-carbon composite anode materials.

Key words: chemical vapor deposition, silicon-carbon composite anode, lithium-ion battery